邹业兵,王智伟,吴天准,彭智婷.卷对卷紫外压印超疏水薄膜的工艺及装置[J].集成技术,2017,6(3):59-67
卷对卷紫外压印超疏水薄膜的工艺及装置
Development of a Roll-to-Roll Ultraviolet Imprint Lithography Equipmentfor Superhydrophobic Film Fabrication
  
DOI:
中文关键词:  卷对卷;超疏水;紫外固化;微纳加工
英文关键词:roll-to-roll; superhydrophobic; UV curing; micro/nano fabrication
基金项目:
作者单位
邹业兵 中国科学院深圳先进技术研究院 深圳 518055;浙江大学 杭州 310027 
王智伟 中国科学院深圳先进技术研究院 深圳 518055 
吴天准 中国科学院深圳先进技术研究院 深圳 518055 
彭智婷 中国科学院深圳先进技术研究院 深圳 518055;中南林业科技大学 长沙 410004 
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中文摘要:
      为了实现大面积、批量化制备超疏水表面材料,文章开发了一种新型的卷对卷紫外压印技术并研制了相应装置。通过卷对卷微纳压印及快速光固化紫外固化胶将母版上的精细微米图形转移到目标柔 性衬底上,无需复杂的制备工艺或苛刻的洁净加工环境,实现超疏水薄膜的快速、高效、批量化制备。文章着重讨论了应用于制备超疏水薄膜的卷对卷紫外压印工艺过程及对应各工艺而设计的机械功能模块。经工艺改进,选用改性的紫外固化胶,转印复制了 20 μm×40 μm×17 μm(直径×间距×柱高)的微结构阵列,所得超疏水薄膜经氟化处理后与水接触角可达 150°以上。最后,尝试使用该装置制备 T 型微纳结构阵列以获得疏水性更佳的表面材料。
英文摘要:
      In this paper, a new roll-to-roll ultraviolet imprint lithography (RtR UV IL) technology was proposed and an equipment for large area super-hydrophobic materials fabrication was developed. By using the RtR micro/nano imprint method and fast UV curing technology, the micro patterns could be transferred to a flexible substrate without complex fabrication process in a clean room. Through this way, large area superhydrophobic film could be fabricated rapidly and efficiently. This paper focuses on discussing the RtR UV IL technology and the related mechanical parts of the equipment which is used for the superhydrophobic film fabrication. After optimizating, a 20 μm×40 μm×17 μm (diameter×pitch×height) micro-structure array was successfully transferred by using modified UVresist. The water contact angle reached up to 150° after fluoride treatment. Finally, we attempted to fabricate T-shaped micro-pillar array by using this equipment to obtain super hydrophobic materials.
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