谷继腾,杨 扬,唐永炳.热处理工艺对硬质合金表面金刚石薄膜 附着性能的影响[J].集成技术,2017,6(4):80-88
热处理工艺对硬质合金表面金刚石薄膜 附着性能的影响
Effects of Heat-Treatment on the Adhesive Strength of Diamond FilmsCoated on the Cemented Carbide Substrates
投稿时间: 2017-05-04  最后修改时间: 2017-05-27
DOI:
中文关键词:  热处理温度;金刚石涂层;附着力;二次形核密度
英文关键词:heat treatment temperature; diamond films; adhesive strength; density of secondary nucleation
基金项目:国家自然科学基金项目( 5 1 4 0 2 3 4 4 ) ; 广东省创新团队项目( 2 0 1 3 C 0 9 0 ) ; 深圳市技术创新计划技术攻关项目 (JSGG20160301173854530);深圳市海外高层次人才创新创业计划(KQJSCX20160301145319);深圳市基础研究项目(JCYJ20160122143847150)
作者单位
谷继腾 中国科学院深圳先进技术研究院 功能薄膜材料研究中心 深圳 518057 
杨 扬 中国科学院深圳先进技术研究院 功能薄膜材料研究中心 深圳 518058 
唐永炳 中国科学院深圳先进技术研究院 功能薄膜材料研究中心 深圳 518059 
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中文摘要:
      文章针对提高硬质合金刀具金刚石涂层结合力问题,提出了一种热处理和酸处理相结合的预处 理工艺,详细研究和分析了 800~1 000℃ 范围内,热处理温度变化与硬质合金刀具表面形貌、金刚石涂 层质量、涂层与刀具间附着力之间的关系。热处理工艺显著降低了生长过程中钴对金刚石涂层石墨化的 催化作用,进一步提高了碳化钨颗粒的比表面积及金刚石二次形核密度,得到的金刚石涂层晶粒尺寸及 压应力较小。过高的热处理温度虽然可以细化基体表面,增加基体与金刚石涂层之间的“机械锁合”作 用,但预处理过程中残留在基体表面的深坑却不利于金刚石涂层附着力的提高,在外力的作用下容易在 深坑附近产生微裂纹。实验结果显示,在氩气气氛中,900℃ 时热处理的硬质合金基体表面生长的金刚 石涂层质量和附着力最佳。
英文摘要:
      In this paper, to improve the adhesive strength of diamond films for the cemented substrates before depositing process, a new approach combined with heat-treatments and acid treatments was investigated. Relations between heat-treatments and surface morphologies, quality of diamond films and the adhesive strength were analyzed within the temperature range of 800~1 000℃. Heat treatment on the cemented substrate was an effective method to improve the adhesive strength for diamond films. With the heating process, large tungsten particles can be refined to small size which can enhance the “interlock functions” between diamond films and the substrate, and improve the density of secondary nucleation. The redundant metal cobalt was removed effectivelyto prevent the catalytic actions, which may cause the transformation from diamond to graphite. However, the adhesive strength was decreased with high temperature heating process subject to the holes left on the substrate surface. Results show that the samples heated at 900℃ owned the strongest adhesive strength and least compressive stress for diamond films.
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