衬底温度对单晶金刚石同质外延生长的 影响规律研究
衬底温度对单晶金刚石同质外延生长的 影响规律研究
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国家自然科学基金项目(51302238)广东省创新团队项目(2013C090);广东省科技计划项目(2014A010105032、 2014A010106016、 2015A010106008、2014A030310226、2014A030310482);深圳市科技计划项目(JSGG20140417113430618、JSGG20140417113430647、 JSKF20150925163525547、JSGG20150602143328010);广东省工程中心项目(20151487);深圳市工程实验室项目(20151837);中科院院级科研 装备项目(yz201440)

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The Effects of Substrate Temperature on Homoepitaxial Growth of SingleCrystal Diamond
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    摘要:

    文章采用微波等离子体化学气相沉积法,以单晶金刚石籽晶为衬底进行金刚石外延生长,通过 拉曼光谱、扫描电子显微镜及光学显微镜等多种表征测试手段,系统地研究了衬底温度对单晶金刚石同 质外延生长的影响机理。研究结果表明,衬底温度是影响同质外延单晶金刚石生长速率、生长模式和生 长缺陷的重要因素:在一定温度范围内,单晶金刚石的生长速率随衬底温度的升高而增加,与此同时, 金刚石的生长模式也由丘状生长转变为台阶生长。当单晶金刚石的生长厚度超过 1 mm 时,较高的衬底 温度容易导致沉积层边缘部分产生孪晶等缺陷。拉曼光谱表征结果显示,微波等离子体化学气相法沉积 的单晶金刚石质量优于传统的高温高压法。

    Abstract:

    In this paper, the microwave plasma chemical vapor deposition method was investigated to produce homoepitaxial single-crystal diamond by the growth of a diamond seed. The effects of substrate temperature on diamond growth were studied via characterizations of Raman spectroscopy, scanning electron microscope and optical microscope. The results show that substrate temperature is an important factor that affects the growth rate, mode and defects. Within a certain temperature range, the growth rate of diamond increases with the substrate temperature rising. Meanwhile, the growth mode also turns into step flow mode instead of hillock mode. The edge of CVD diamond layer is prone to producing crystalline defects such as twin crystals when the growth thickness of single crystal diamond exceeds 1 mm. Results by Raman spectroscopy demonstrat that single-crystal diamondobtained by the microwave plasma chemical vapor deposition method exhibits better quality than conventional high temperature and high pressure methods.

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引文格式
石 磊,蒋春磊,牛卉卉,唐永炳.衬底温度对单晶金刚石同质外延生长的 影响规律研究 [J].集成技术,2017,6(4):2-9

Citing format
SHI Lei, JIANG Chunlei, NIU Huihui, TANG Yongbing. The Effects of Substrate Temperature on Homoepitaxial Growth of SingleCrystal Diamond[J]. Journal of Integration Technology,2017,6(4):2-9

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  • 收稿日期:2017-04-12
  • 最后修改日期:2017-06-02
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  • 在线发布日期: 2017-07-19
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