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金刚石薄膜的制备研究综述

Review on the Synthesis of Diamond Films

  • 摘要: 金刚石薄膜具有优异的物理化学性质, 在耐磨涂层、生物医学、薄膜微传感器、微机电系统等诸多领域有着广阔的应用前景。文章综述了近年来在金刚石薄膜领域研究的最新进展, 着重介绍了目前主流的金刚石薄膜制备方法及优缺点, 阐述了薄膜的生长机理以及提高金刚石薄膜沉积速率和质量的技术方法, 为该领域的研究人员提供参考。

     

    Abstract: Benefited from the excellent physical and chemical properties of diamond, chemical vapour deposition (CVD) diamond thin films have attracted continuous attentions among researchers regarding to both basic research and industry application like cutting tools, biomedicine, thin film sensors and micro-electromechanical systems etc. In this paper, recent progress in the field of diamond film research is reviewed. It is mainly focused on various synthesis methods of diamond thin films and comparison of their pros and cons. By introducing the growing mechanism of CVD diamond thin films, strategies to improve the deposition rates and quality of diamond thin films are also discussed.

     

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