the National Key R & D Project from Minister of Science and Technology of China (2017YFB0406300)
GUO Yongfu, WANG Riming, YU Shuhui, CHU Baojin, SUN Rong. High-Capacitance Thin Film Tantalum Electrolytic Capacitor Fabricated from Electrochemically Etched Tantalum Foils[J]. Journal of Integration Technology,2021,10(1):35-46
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