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热蒸发法制备Ag2Se柔性薄膜及器件

Thermal Evaporation Method for Preparing Ag2Se Flexible Thin Films and Devices

  • 摘要: 随着可穿戴设备的快速发展,对绿色高效供能方案的需求愈发迫切,小型柔性温差发电器件因此成为了研究热点。但热电材料性能局限与器件设计难题严重制约该领域进程的突破。硒化银(Ag2Se)是一种极具潜力的热电材料,在室温环境下展现出与经典材料Bi2Te3相媲美的优异性能,为柔性器件发展带来新契机。本研究采用热蒸发法在聚酰亚胺衬底上制备Ag2Se薄膜,通过改变退火温度,调控Ag2Se (013)取向生长,当退火温度为453 K时,厚580 nm的 Ag2Se薄膜的功率因子达到14.87 μW/(cm·K2)。随后通过后硒化处理调控Ag2Se薄膜成分,将Ag2Se薄膜的功率因子进一步提高至19.13 μW/(cm·K2)。以此为基础制备Ag2Se-Ag单腿柔性发电器件,当温差为40 K时,器件最大输出功率达到235.2 nW。通过增加旋涂聚月桂酸乙烯酯有机层工艺可极大地改善器件的柔韧性,在6 mm弯曲半径、1000次循环测试中仍然保有90%以上性能,展示了热蒸发法制备Ag2Se器件在可穿戴发电领域的巨大潜力。

     

    Abstract: The burgeoning development of wearable devices has spurred an urgent demand for green and efficient power supply solutions, propelling miniaturized flexible thermoelectric generators to the forefront of research. Nevertheless, the performance constraints of thermoelectric materials and intricate device design challenges remain formidable barriers to technological advancement in this field. Silver selenide (Ag2Se), a highly promising thermoelectric material, exhibits room-temperature performance comparable to that of the conventional bismuth telluride (Bi2Te3), thereby offering novel opportunities for the development of flexible thermoelectric devices. In this work, Ag2Se thin films were synthesized on polyimide (PI) substrates via thermal evaporation. By systematically varying the annealing temperature, we achieved precise control over the preferred (013) orientation of the Ag2Se films. The film annealed at 453 K, with a thickness of 580 nm, demonstrated a maximum power factor of 14.87 μW/(cm·K2). Subsequent post-selenization treatment was applied to further optimized the composition of the Ag2Se thin films, elevating the power factor to 19.13 μW/(cm·K2). Based on the optimized thin films, an Ag2Se-Ag single-leg flexible thermoelectric generator was fabricated. Under a temperature gradient of 40 K, the device delivered a maximum output power of 235.2 nW. Notably, the flexibility of the device was significantly improved by introducing a spin-coated poly (vinyl laurate) organic layer. It retained over 90% of its initial performance after 1000 repeated bending cycles at a small radius of 6 mm. These findings collectively underscore the substantial potential of Ag2Se devices prepared via thermal evaporation for applications in wearable power generation.

     

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