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柔性热电技术在微电子电路中的集成与应用

Integration and Application of Flexible Thermoelectrics on Microelectronic Integrated Circuits

  • 摘要: 随着电路集成度提高,传统硅基器件在高频、高功率场景下面临温升失控难题,并且其刚性与脆性特点与当代轻便柔性的需求相悖,因此需开展传统硅基器件的新型散热方式和新型非硅基器件的相关研究。柔性热电技术凭借制冷和发电特性为传统硅基器件散热及柔性非硅基器件供能提供了创新方案,成为微电子领域的研究热点。本文首先系统综述了该技术的制冷与发电原理;其次,探讨了芯片散热设计策略与柔性热电自供能系统的构建方案,分析了从制冷材料研发到微型、薄膜与新型结构设计的芯片散热方案,阐述从发电方式、能源管理到储能设计的完整柔性热电自供能系统架构;最后,展望了该技术与多能源系统协同、人工智能交叉创新两大方向,为其在微电子领域规模化应用提供理论与实践支撑。

     

    Abstract: Rising circuit integration intensifies thermal runaway risks in conventional silicon-based devices during high-frequency and high-power applications. Therefore, it is necessaryto develop effective thermal management strategies for silicon-based systems and to explore alternative non-silicon materials. Flexible thermoelectric conversion technology addresses these challenges by enabling simultaneous active cooling of silicon devices and sustainable power generation for flexible electronics, establishing it as a research hotspots in microelectronics. This paper systematically examines the fundamental principles of thermoelectric cooling and energy harvesting. It reviews design strategies for chip-level thermal management and flexible thermoelectric self-powered systems, with a focus on innovations in thermoelectric materials, microscale engineering, thin-film architectures, and novel structural designs. Furthermore, the paper discusses comprehensive self-powered system architectures, including energy harvesting techniques, power management circuits, and storage solutions. Finally, it explores synergistic integration with multi-energy systems and cross-disciplinary advancements enabled by artificial intelligence, providing theoretical frameworks and practical guidance to facilitate the large-scale deployment of next-generation microelectronics.

     

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