高温高湿环境下镍铬合金薄膜电阻器失效分析
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广东省基础与应用基础研究基金项目(2020B1515120019);深圳科学技术创新委员会项目(KQTD20170810160424889)

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Failure Analysis of Ni-Cr Film Resistor in High Temperature and High Humidity Environment
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Guangdong Basic and Applied Basic Research Foundation (2020B1515120019), and Shenzhen Science and Technology Innovation Commission (KQTD20170810160424889)

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    摘要:

    在 85 ℃ 和 85% 相对湿度的环境下,对镍铬(Ni-Cr)合金薄膜电阻器进行带载老化试验(“双 85”老化试验),测试其老化试验 3 000 h 后的可靠性。测试结果显示,在“双 85”老化试验环境下,薄膜电阻器进行老化试验后,表现出两种失效模式:阻值漂移和开路。该文进一步对两种失效模式的失效机理进行分析,阐明了失效的原因。针对失效的薄膜电阻,采用 3D 共聚焦激光显微镜、扫描电子显微镜、X 射线能谱仪和聚焦离子束等分析手段进行检测,检测结果显示,薄膜电阻器的端电极处出现开裂。进一步对失效部位进行分析发现,电极层除开裂等明显问题外,还出现了银电极被硫化腐蚀的情况。

    Abstract:

    The reliability of Ni-Cr alloy thin film resistors were tested by an aging test under an environment of 85 ℃ and 85% relative humidity for 3 000 h. The results show that the thin-film resistors exhibit two failure modes, resistance drift, and open circuit, after aging tests at 85 ℃ and 85% relative humidity. The failure mechanism of both failure modes was further analyzed, and the causes of failure were clarified. The failed resistors were examined by a 3D laser scanning microscope, scanning electron microscope, energy dispersive spectroscopy, and focused ion beam to analyze the cause of resistor failure. The results show that there is a crack in the terminal electrode of the film resistor. In addition to the obvious problems such as cracking, the electrode layer also showed sulfide corrosion of the Ag electrode.

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引文格式
蔡亚丽,刘丽霞,戴文斌,等.高温高湿环境下镍铬合金薄膜电阻器失效分析 [J].集成技术,2022,11(5):88-98

Citing format
CAI Yali, LIU Lixia, DAI Wenbin, et al. Failure Analysis of Ni-Cr Film Resistor in High Temperature and High Humidity Environment[J]. Journal of Integration Technology,2022,11(5):88-98

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  • 在线发布日期: 2022-09-21
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