基于积层胶膜材料封装基板的信号损耗研究
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TM215.1

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国家自然科学基金项目(U20A20255);深圳市科技计划项目(JSGG20210629144805017)


Study on Signal Loss of Packaging Substrate Based on Build-Up Film Material
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This work is supported by National Natural Science Foundation of China (U20A20255) and Shenzhen Science and Technology Program (JSGG20210629144805017)

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    摘要:

    随着摩尔定律逐渐逼近其物理极限,下一代集成电路技术的发展面临前所未有的挑战,不仅技术难度陡增,成本也呈急剧上升趋势。在此背景下,先进的封装基板作为支持系统集成和巨量 I/O 提升的重要载体,成为后摩尔时代的核心部件之一。基于积层绝缘胶膜(build-up film,BF)材料的半加成工艺是实现细间距多层封装基板的主要途径之一。由于电子设备在高频高速运行环境中的信号完整性面临严峻挑战,因此该文着重探讨了 BF 材料的物理性能和结构特征对信号传输损耗的影响,并基于微带线和过孔等典型基板结构,通过电学仿真分析系统研究了 BF 材料参数与信号传输性能之间的关系。研究表明:在微带线结构中,信号传输损耗随频率的增加而增大,且这一损耗与 BF 材料的介电损耗因子密切相关;而在过孔结构中,BF 材料的介电常数显著影响等效电容和阻抗值,进而影响阻抗的不匹配度。BF 材料的特性虽然对阻抗不匹配有一定影响,但过孔结构本身的设计仍是影响阻抗匹配度的主要因素。此外,高频下导体趋肤效应导致的导体损耗随着铜箔粗糙度的增加而增加,可为封装基板制造过程中的铜箔质量控制提供参考。该研究揭示了 BF 材料的物理性能和结构特征对信号传输损耗的影响机制,可为封装基板设计提供参考。

    Abstract:

    Against the backdrop of Moore’s Law approaching its limits and the increasing difficulty and cost of next-generation integrated circuit technologies, advanced substrate technology emerges a crucial carrier for supporting I/O enhancementand system integration in the realm of advanced packaging. It is also one of the core components in the post-Moore era. Currently, semi-additive process utilizing build-up film (BF) is one of theprimary methods for achieving fine-pitch multilayer packaging substrates. Given the increasingly prominent issue of signal integrity in electronic equipment operating in high-frequency and high-speed environments, this paper thoroughly discusses the impact of the physical properties of BF material and structural characteristics on signal transmission loss. Based on typical substrate structures, such as microstrip lines and vias, the relationship between BF material parameters and signal transmission performance is studied using an electrical simulation analysis system. It is found that in a microstrip structure, the signal transmission loss increases with an increase in frequency, and this loss is closely related to the dielectric loss factor of BF material. However, in the via structure, the dielectric constant of the BF material significantly influences the equivalent capacitance and the value of impedance, subsequently affecting impedance mismatch. Although the characteristics of the BF material do have some impact on impedance mismatch, the primary factor affecting impedance matching remains the design of via structure itself. In addition, the conductor loss resulting from the skin effect increases with the rise in copper foil roughness at high frequency, offering a crucial reference for quality control of copper foil during the manufacturing process of packaging substrate. This study elucidates the mechanism of physical property and structural characteristics of BF material influencing signal transmission loss, thereby proving a theoretical foundation for the design and optimization of BF material with enhanced physical properties for packaging substrate.

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引文格式
孔维坤,钟 诚,陈文博,等.基于积层胶膜材料封装基板的信号损耗研究 [J].集成技术,2025,14(1):91-104

Citing format
KONG Weikun, ZHONG Cheng, CHEN Wenbo, et al. Study on Signal Loss of Packaging Substrate Based on Build-Up Film Material[J]. Journal of Integration Technology,2025,14(1):91-104

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  • 收稿日期:2024-01-19
  • 最后修改日期:2024-01-19
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  • 在线发布日期: 2024-07-02
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