基于积层胶膜材料封装基板的信号损耗研究
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作者单位:

1.中国科学技术大学,中国科学院深圳先进技术研究院;2.中国科学院深圳先进技术研究院

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中图分类号:

TM215.1

基金项目:

国家自然科学基金项目(U20A20255);深圳市科技计划项目(JSGG20210629144805017)


Study on Signal Loss of Substrate Based on Build-Up Film Material
Author:
Affiliation:

Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences

Fund Project:

National Natural Science Foundation of China (U20A20255) and Shenzhen Science and Technology Program (JSGG20210629144805017)

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    摘要:

    在摩尔定律接近极限,下一代集成电路技术难度大且成本激增的背景下,先进的封装基板是支持系统集成以及巨量I/O提升的重要载体,是后摩尔时代的核心部件之一。基于积层绝缘胶膜(Build-up Film,BF)材料的半加成法工艺是实现细间距多层封装基板的主要途径之一。鉴于电子设备在高频高速场景下运行时信号完整性问题日益凸显,本文深入探讨了BF材料及结构特征对信号传输损耗的影响。基于微带线、过孔等典型基板结构,通过电学仿真分析系统研究了BF材料参数与信号传输性能之间的关系。研究发现,在微带线结构中,信号传输损耗随频率的增加而增大,且这一损耗与BF材料的介电损耗因子密切相关。而在过孔结构中,BF材料的介电常数对等效电容和阻抗极值有显著影响,进而影响阻抗的不匹配度。尽管BF材料特性对阻抗不匹配有一定影响,但过孔结构本身的设计仍是影响阻抗匹配度的主要因素。此外,高频下导体趋肤效应导致的导体损耗随着铜箔粗糙度的增加而增加,这为封装基板制造过程中的铜箔质量控制提供了重要参考。本研究揭示了BF材料及结构特征对信号传输损耗的影响机制,为BF材料物性及封装基板的设计和优化提供了理论依据。

    Abstract:

    Against the backdrop of Moore''s Law approaching its limit and the difficulty and surging cost of next-generation integrated circuit technologies, advanced substrate technology is an important carrier to support huge I/O enhancement as well as system integration in the field of advanced packaging, and is one of the core components in the post-Moore era. Currently, semi-additive process based on build-up film (BF) is one of the main ways to realize fine-pitch multilayer packaging substrates. In view of the increasingly prominent problem of signal integrity when electronic equipment operates in high-frequency and high-speed scenes, this paper deeply discusses the influence of physical property of BF materials and structural characteristics on signal transmission loss. Based on typical substrate structures such as microstrip lines and vias, the relationship between BF material parameters and signal transmission performance is studied by electrical simulation analysis system. It is found that in microstrip structure, the signal transmission loss increases with the increase of frequency, and this loss is closely related to the dielectric loss factor of BF material. However, in the via structure, the dielectric constant of BF material has a significant influence on the equivalent capacitance and impedance extreme value, and then affects the impedance mismatch. Although the characteristics of BF material have some influence on impedance mismatch, the design of via structure itself is still the main factor affecting impedance matching. In addition, the conductor loss caused by conductor skin effect increases with the increase of copper foil roughness at high frequency, which provides an important reference for the quality control of copper foil in the manufacturing process of packaging substrate. This study reveals the influence mechanism of BF material and structural characteristics on signal transmission loss, which provides a theoretical basis for the design and optimization of BF material with improved physical properties for packaging substrate.

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引用本文

孔维坤,钟诚,陈文博,等.基于积层胶膜材料封装基板的信号损耗研究 [J].集成技术,

Citing format
Kong Weikun, Zhong Cheng, Chen Wenbo, et al. Study on Signal Loss of Substrate Based on Build-Up Film Material[J]. Journal of Integration Technology.

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  • 收稿日期:2024-01-19
  • 最后修改日期:2024-01-19
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  • 在线发布日期: 2024-07-02
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