不同还原气氛烧结BaTiO3基陶瓷的性能研究
CSTR:
作者:
作者单位:

1.中国科学院深圳先进技术研究院;2.昆明理工大学;3.广东风华高新科技股份有限公司

作者简介:

通讯作者:

中图分类号:

TQ 174

基金项目:

国家重点研发计划(2022YFB380740);国家自然科学基金(51802142);广东省自然科学基金(2022A1515012604);新型电子元器件与材料国家重点实验室(FHR-JS-202011012);先进电子元器件联合创新中心(EHR-JS-202103001)。


Study on the properties of BaTiO3-based ceramics sintered in different reducing atmospheres
Author:
Affiliation:

1.Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences;2.Kunming University of science and Technology;3.Guangdong Fenghua High-Tech Co., Ltd.

Fund Project:

National Key Research and Development Program of China (2022YFB380740), National Science Foundation of China (51802142), Natural Science Foundation of Guangdong Province(2022A1515012604), State Key Laboratory of Key Materials and Processes for New Electronic Components (FHR-JS-202011012) and Joint Innovation Centre for Advanced Electronic Components (FHR-JS-202103001)

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    随着片式多层陶瓷电容器(MLCC)内电极材料从贵金属被镍等贱金属替代,烧结过程需在还原气氛下进行。该文研究了在不同还原气氛下烧结的Mn掺杂BaTiO3基陶瓷的性能,探讨了H?/N?比例变化对介电性能和可靠性的影响。通过固相法制备了不同还原气氛下的样品,并通过X射线衍射(XRD)、扫描电子显微镜(SEM)、拉曼光谱和X射线光电子能谱(XPS)等方法对样品进行了微观结构和性能表征。研究发现,极化机制会影响BaTiO3基陶瓷的介电性能和可靠性。具体而言,随着还原气氛的增强,极化机制从缺陷载流子的短程跳跃极化逐渐转变为长程跃迁极化,从而影响了陶瓷的介电常数、介电损耗和绝缘电阻率。实验结果表明,在1.5% H?/98.5% N?气氛下烧结的样品(S2)表现出较高的介电常数、较低的介电损耗以及较好的绝缘性能,展示出更好的综合性能。此外,成功制备了介质层厚为0.9 μm的BaTiO3基MLCCs,其容温系数(TCC)符合X6S标准。该研究为提升BME-MLCCs介电性能与可靠性提供了理论和技术指导。

    Abstract:

    As the internal electrode materials in multilayer ceramic capacitors (MLCCs) are increasingly being replaced by base metals such as nickel instead of precious metals, the sintering process must be conducted in a reducing atmosphere. This work investigates the properties of Mn-doped BaTiO3-based ceramics sintered under different reducing atmospheres, exploring the effect of varying H?/N? ratios on dielectric performance and reliability. BaTiO3-based ceramics were prepared using the solid-phase method under different reducing atmospheres. X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS) were employed to characterize the microstructure and properties of the samples. The study found that the polarization mechanism significantly affects the dielectric performance and reliability of BaTiO3-based ceramics. Specifically, as the reducing atmosphere intensifies, the polarization mechanism transitions from short-range defect dipole polarization to long-range defect carrier polarization, impacting the dielectric constant, dielectric loss, and insulation resistance. The sample sintered under 1.5% H?/98.5% N? (S2) exhibited the highest dielectric constant, lowest dielectric loss, and best insulation resistance, demonstrating excellent overall performance. Additionally, BaTiO3-based MLCCs with thickness of 0.9 μm and the TCC of X7R were successfully fabricated. This work provides theoretical and technical guidance for improving the dielectric performance and reliability of BME-MLCCs.

    参考文献
    相似文献
    引证文献
引用本文

许周怡,张凡,张蕾,等.不同还原气氛烧结BaTiO3基陶瓷的性能研究 [J].集成技术,

Citing format
Xu zhouyi, Zhang fan, Zhang lei, et al. Study on the properties of BaTiO3-based ceramics sintered in different reducing atmospheres[J]. Journal of Integration Technology.

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2024-12-01
  • 最后修改日期:2025-03-18
  • 录用日期:2025-03-19
  • 在线发布日期: 2025-03-20
  • 出版日期:
文章二维码