Research Progress of Silicon-Based Photonic Modulator
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This?work?is?supported?by?National?Key?Research?and?Development?Program?(2018YFB2200500), National Natural Science Foundation of China (61204080), National Key Laboratory Fund Project (SKL201804), Key Research and Development Program of Shanxi Province (2022GY-012, 2020KW-011) and Science and Technology Plan Project of Xi’an (2020KJRC0026)

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    Abstract:

    Photonic?modulator?is?the?core?component?of?optical?fiber?communication?system,?which?mainly modulates the optical signal and realizes the conversion of the signal from the electrical domain to the optical domain. With the development of silicon based semiconductor technology, silicon based photonic modulator has gradually become the mainstream silicon photonic devices, and the realization of gigahertz bandwidth?modulator?based?on?silicon?technology?has?laid?a?foundation?for?the?development?of?silicon photonics. At present, the modulation speed of silicon-based photonic modulator has exceeded 50 GHz, which?basically?meets?the?bandwidth?requirements?of?modulation?format.?However,?silicon-based?photonic modulators?with?low?driving?voltage?and?low?insertion?loss?are?still?a?field?worthy?of?research.?More?and more research institutions have joined the research of silicon-based photonic modulators and have made great progress. This paper mainly analyzes the research progress of silicon-based photonic modulators at home and abroad, discusses the research status of silicon-based photonic modulators based on SOI materials,?SiGe?materials,?Ge?materials,?ferroelectric?materials,?organic?photoelectric?materials,?Ⅲ-Ⅴ?group materials and graphene materials, and compares and analyzes the performance of relevant modulators. It provides?ideas?for?further?research?and?development?of?photonic?modulator?with?high?speed?and?low?loss?in the future.

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HU Xiangjian, FENG Song, FENG Lulu, et al. Research Progress of Silicon-Based Photonic Modulator[J]. Journal of Integration Technology,2022,11(2):89-106

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  • Received:
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  • Online: March 22,2022
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