国家自然科学基金项目(52102055, 5227020331, 52075527);国家重点研发计划项目(2017YFB0406000, 2017YFE0128600)
This work is supported by National Natural Science Foundation of China (52102055, 5227020331, 52075527), National Key R&D Program of China (2017YFB0406000, 2017YFE0128600)
引文格式
代文,林正得,易剑.金刚石热沉与半导体器件连接技术研究现状与发展趋势 [J].集成技术,2023,12(5):27-40
Citing format
DAI Wen, LIN Chengte, YI Jian. Research Status and Development Trend of Connection Technology of Diamond Heat Sink and Semiconductor Device[J]. Journal of Integration Technology,2023,12(5):27-40